Ion Sources

"Ion beam techniques have become a basic technology in the sciences and device manufacturing. For the efficient use of these techniques the appropriate choice, design and operation of ion source is important. This book deals with the fundamental knowledge regarding the gas discharge, extraction system, space-charge self-neutralization, and principles for producing various ions and determining the mass and energy spectra of the sources. The book is intended for researchers, technicians and university students."--BOOK JACKET.